
Shields
Parts of semiconductor manufacturing devices such as an etching device
Material: A5083

High surface quality machining utilizing a turning function
POINT 01
- High-efficiency turning with dynamic tilt turning
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- Performing turning with the tool edge kept at a constant angle while rotating the tilting axis (A-axis)
- Making it possible to machine the inside diameter of an undercut part while avoiding interference of the workpiece and the tool
- Realizing improvement of the surface quality and eliminating the surface boundary error by machining the inside diameter of an undercut part with the same tool for other parts

POINT 02
- Process-intensive machining with auto pallet changer (APC)
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- Achieving manpower saving and efficient workpiece change with APC
- Completing in multi-processes with one machine for workpieces that require machining for the front and back sides, etc.

