
Plates
Components for sealing surfaces of semiconductor manufacturing devices
Material: A5052
 
								Improving the seal surface quality with 
tool grooving
								POINT 01
								
							- High-quality seal surface machining
- 
										- Efficiently eliminating cutter marks caused by end mills at the time of roughing, using a tool grooving function
 Achieves high-quality seal grooving
- Making it possible to machine various sealing surfaces such as linear and curve shapes
 
- Efficiently eliminating cutter marks caused by end mills at the time of roughing, using a tool grooving function
Flat-Tool Grooving (sample workpiece)
								POINT 02
								
							- Realizing high-efficiency and high-quality groove machining with a high rigid machine construction
- 
										- A highly rigid construction using FEM analysis
- A small overhang from the slideway to the machining surface to ensure high rigidity
 
 
								






 
								 
									