
Plates
Components for sealing surfaces of semiconductor manufacturing devices
Material: A5052

Improving the seal surface quality with
tool grooving
POINT 01
- High-quality seal surface machining
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- Efficiently eliminating cutter marks caused by end mills at the time of roughing, using a tool grooving function
Achieves high-quality seal grooving - Making it possible to machine various sealing surfaces such as linear and curve shapes
- Efficiently eliminating cutter marks caused by end mills at the time of roughing, using a tool grooving function
Flat-Tool Grooving (sample workpiece)
POINT 02
- Realizing high-efficiency and high-quality groove machining with a high rigid machine construction
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- A highly rigid construction using FEM analysis
- A small overhang from the slideway to the machining surface to ensure high rigidity
