Polygonal chambers

Vacuum chamber parts of semiconductor manufacturing devices

Material: A5052

Processes from turning to milling can be completed without chuck change or setup change time

POINT 01

Reducing time and effort of setups with process-intensive machining of turning and milling

Making it possible to conduct turning, milling, machining of slant holes, and multi-sided machining without chuck change
Reducing accumulated errors of workpiece attachment by decreasing the number of times of setup to shorten the lead time
Decreasing the design and manufacturing costs by reducing setup parts

Accomplish various machining without chuck change

POINT 02

Maintaining 5-axis machining accuracy for a long time

Correcting geometric errors automatically with 5-Axis Auto Tuning System
Allowing any worker to easily correct the accuracy of the 5-axis machining center, which was formerly difficult to adjust, reducing boundary errors and hole position errors

POINT 03

Achieves long-term stable operation with a sludgeless tank

5-Axis Vertical Machining Center: A high-accuracy 5-axis machining center with excellent ease of use and machining capacity