OPEN POSSIBILITIES

INDUSTRY SOLUTIONSSemiconductor industry

Plates

Plates

Components for sealing surfaces of semiconductor manufacturing devices

Material: A5052

Semiconductor industry

Improving the seal surface quality with
tool grooving

POINT 01
High-quality seal surface machining
  • Efficiently eliminating cutter marks caused by end mills at the time of roughing, using a tool grooving function
    Achieves high-quality seal grooving
  • Making it possible to machine various sealing surfaces such as linear and curve shapes

Flat-Tool Grooving (sample workpiece)

POINT 02
Realizing high-efficiency and high-quality groove machining with a high rigid machine construction
  • A highly rigid construction using FEM analysis
  • A small overhang from the slideway to the machining surface to ensure high rigidity
Less overhang
Less overhang