OPEN POSSIBILITIES

INDUSTRY SOLUTIONSSemiconductor industry

Base rings

Base rings

Parts for inspection equipment

Material: A5052P, etc.

Semiconductor industry

Stable machining of thin workpieces with
large diameters

POINT 01V920EX
The workpiece is in close contact under its own weight
Reducing distortion of workpieces caused by chucking force
  • Chucking thin workpieces with large diameters stably with minimal interference from gravity
  • Adopting chip washing and stainless steel chute as standard for smooth chip discharge
The workpiece is in close contact under its own weight
									Reducing distortion of workpieces caused by chucking force V920EX
POINT 02MB-56VⅡ
Thermo-Friendly Concept enables the machine to autonomously maintain high accuracy and to achieve dimensional stability during long runs of machining
  • Machining dimensional change over time (actual data): 7μm (8 °C room temp change)
  • Contributing to the reduction of the workload associated with correction of workpiece dimensions, and minimizing warm-up time
High dimensional stability