Chambers
Vacuum chamber parts of semiconductor manufacturing devices
Material: SUS304
Efficient machining from block materials
POINT 01
- Improvement in efficiency of roughing and high-speed finishing with a high-output spindle
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- Main spindle capacity: 10,000min-1 No.50 (option)
- Suitable for a wide range of processes from heavy-duty cutting to high-feed machining
High-efficiency machining with a power spindle
(sample workpiece)
POINT 02
- Enabling machining for a long time without the intervention of a worker, with an enhanced in-machine chip discharge ability
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- Preventing problems with chips during operation with a simple in-machine cover structure and enhancement of coolant washing
POINT 03
- Reducing the burden of tank cleaning with a sludgeless tank
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- Collecting sludge efficiently with three types of filtration systems
- Sludge removal rate: 99%
- No tank cleaning for 3 years (Okuma equipment actual data)
Click below for products that achieve this machining
